Important dates:

Abstract submission opening: April 23rd, 2019

Abstract submission deadline: Abstract submission deadline has passed; however,  you will still be able to submit an abstract considered for a late Poster if submitted at  the latest by July 10th

Authors notification: July 12th, 2019
Conference: September 4th - 6th, 2019


It is our great pleasure to invite you to the 2nd ELENA conference that will be held on September 4th – 6th, 2019 in IMEC, Leuven (Belgium).

ELENA: Low energy ELEctron driven chemistry for the advantage of emerging NAno-fabrication methods

ELENA is a Horizon 2020 Marie Sklodowska-Curie Innovative Training Network. It pulls together diverse resources from commercial partners, research institutes and universities to study the fundamental processes underpinning two innovative, next generation nanoscopic fabrication techniques: Extreme Ultra Violet Lithography (EUVL) and Focused Electron Beam Induced Processing (FEBIP). The network seeks to train through research a new generation of Early Stage Researchers with a fundamental understanding of the physics and chemistry underpinning FEBIP and EUVL and in commercial and entrepreneurial skills necessary to bring such research from the laboratory to the commercial arena. The overall aim is to translate the knowledge gained in this collaborative project to technological advantage with the ultimate goal of making these methods commercially competitive within the nanotechnology industry.
More information about ELENA can be found here:

Based on the successful 1st conference at the Sieldce University in 2018, this conference aims to bring together leading experts from both academia and industry to share their vision and results about: fundamental aspects of material chemistry, light-matter interaction, low electron energy induced processes, metrology, fields of applications, technology needs and material and process challenges for EUVL and FEBIP. The two-days and half program will include invited and contributed speakers, a poster session and a reception on the evening of September 5th.

On behalf of the organizing committee, it will be our pleasure to welcome you in Leuven.






This project has received funding from
the European Union’s Horizon 2020 research and innovation  programme
under the Marie Skłodowska-Curie grant agreement No 722149